Effect of Annealed Duration and Temperature on Crystallinity of Ta2O5 Thin Films

Sukaryo, Sulistioso Giat and Darmasetiawan, H. and Irzaman, Irzaman and Indro, M N (2012) Effect of Annealed Duration and Temperature on Crystallinity of Ta2O5 Thin Films. Kontribusi Fisika Indonesia, 13 (1).

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Item Type: Article
Subjects: Taksonomi BATAN > Daur Bahan Bakar Nuklir dan Bahan Maju > Bahan Struktur dan Bahan Maju
Taksonomi BATAN > Daur Bahan Bakar Nuklir dan Bahan Maju > Bahan Struktur dan Bahan Maju
Divisions: BATAN > Pusat Sains dan Teknologi Bahan Maju
IPTEK > BATAN > Pusat Sains dan Teknologi Bahan Maju
Depositing User: Administrator Repository
Date Deposited: 02 Dec 2018 13:07
Last Modified: 31 May 2022 09:23
URI: https://karya.brin.go.id/id/eprint/7538

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