The effect of 5 mass% O3 gas on PLD of tantalum oxide

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Hino, T. and Mustofa, S. and Nishida, M. and Araki, T. (2002) The effect of 5 mass% O3 gas on PLD of tantalum oxide. Applied Surface Science, 189 (1-2). pp. 1-6. ISSN 01694332

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S0169433201003956 - Published Version
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Official URL: http://doi.org/10.1016/S0169-4332(01)00395-6

Item Type:	Article
Subjects:	Taksonomi BATAN > Daur Bahan Bakar Nuklir dan Bahan Maju > Bahan Struktur dan Bahan Maju Taksonomi BATAN > Daur Bahan Bakar Nuklir dan Bahan Maju > Bahan Struktur dan Bahan Maju
Divisions:	BATAN > Pusat Sains dan Teknologi Bahan Maju IPTEK > BATAN > Pusat Sains dan Teknologi Bahan Maju
Depositing User:	Administrator Repository
Date Deposited:	30 Nov 2018 17:09
Last Modified:	31 May 2022 03:55
URI:	https://karya.brin.go.id/id/eprint/6903

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