A lightweight resonance tracking system for piezoresistive microcantilever sensors

Setiono, Andi and Nelfyenny, Nelfyenny and Suryadi, Suryadi and Qomaruddin, Qomaruddin and Nyang’au, Wilson Ombati and Peiner, Erwin (2025) A lightweight resonance tracking system for piezoresistive microcantilever sensors. Micro and Nano Systems Letters, 13 (1). ISSN 2213-9621

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Abstract

A lightweight resonance tracking system designed for precise monitoring of resonant frequency shifts in microcantilever sensors is introduced. The system integrates a Phase-Locked Loop (PLL)-based technique with a Python-based interface for real-time control and visualization. A tipless microcantilever sensor was tested under relative humidity (RH) conditions ranging from 63% to 90% to experimentally validate the system. The system demonstrated a sensitivity of 1.082 Hz/% RH and a Limit of Detection (LOD) of 1.89% RH. The silicon dioxide (SiO2) surface of the microcantilever is hygroscopic, allowing water vapor adsorption and causing frequency shifts. This effect is more pronounced at high humidity levels (>80% RH) due to multilayer adsorption. These results confirm the reliability and precision of the system in detecting environmental changes. The findings highlight the potential of the developed system for applications in environmental monitoring, healthcare diagnostics, and industrial chemical sensing.

Item Type: Article
Uncontrolled Keywords: Microcantilever sensor; Resonance tracking; Lightweight system; Phase-Locked Loop (PLL); Sensor performance; Real-time monitoring
Subjects: Biomedical Technology & Human Factors Engineering
Depositing User: Maria Regina
Date Deposited: 26 Nov 2025 03:22
Last Modified: 26 Nov 2025 03:22
URI: https://karya.brin.go.id/id/eprint/55263

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