Items where Author is "Isobe, Michiro"
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Harumningtyas, Anjar Anggraini and Ito, Tomoko and Isobe, Michiro and Zajíčková, Lenka and Hamaguchi, Satoshi (2023) Molecular dynamics simulation of amine formation in plasma-enhanced chemical vapor deposition with hydrocarbon and amino radicals. Journal of Vacuum Science & Technology A, 41 (6). ISSN 0734-2101