The comparison between two different methods of synthesize of solid electrolyte Li₃PO₄ as precursor material for developing lithium ion battery, has been performed. The first method is to synthesize Li₃PO₄ prepared by wet chemical reaction from LiOH and H₃PO₄ which provide facile, abundant available resource, low cost, and low toxicity. The second method is solid state reaction prepared by Li₂CO₃ and NH₄H₂PO_4. In addition, the possible morphology identification of comparison between two different methods will also be discussed. The composition, morphology, and additional identification phase and another compound of Li₃PO₄ powder products from two different reaction are characterized by SEM, EDS, and EIS. The Li₃PO₄ powder produced from wet reaction and solid state reaction have an average diameter of 0.834 – 7.81 µm and 2.15 – 17.3 µm, respectively. The density of Li₃PO₄ prepared by wet chemical reaction is 2.238 gr/cm³, little bit lower than the sample prepared by solid state reaction which density is 2.3560 gr/cm³. The EIS measurement result shows that the conductivity of Li₃PO₄ is 1.7 x 10⁻⁹ S.cm⁻¹ for wet chemical reaction and 1.8 x 10⁻¹⁰ S.cm⁻¹ for solid state reaction. The conductivity of Li₃PO₄ is not quite different between those two samples even though they were prepared by different method of synthesize.