STUDI AWAL DEPOSISI LAPISAN TIPIS YTTRIA-STABILIZED ZIRCONIA (YSZ) PADA SUBSTRAT BAJA FERITIK DENGAN METODE PLD - PULSED LASER DEPOSITION
Abstract
Abstrak
Studi awal lapisan tipis Yttria-Stabilized Zirconia (YSZ) telah berhasil dideposisi di atas substrat baja feritik dengan teknik Pulsed Laser Deposition (PLD) di fasilitas laboratorium Pusat Sains dan Teknologi Bahan Maju - BATAN. Lapisan tipis ini dideposisi dengan tekanan chamber dalam rentang 200 mTorr hingga 225 mTorr dengan temperatur substrat pada temperatur ruang serta pulsa tembakan laser adalah 30×1000 tembakan dengan frekuensi 10 Hz. Selanjutnya sampel yang diperoleh dianalisis dengan Optical Microscope (OM), X-Ray Diffractometer (XRD), Raman Spectrometer dan Atomic Force Microscope (AFM). Sebagai bahan perbandingan sampel tersebut dipanaskan (annealing) pada temperatur 800oC kemudian dikarakterisasi dengan metode yang sama. Hasil analisis secara visual maupun dengan OM serta AFM menunjukkan bahwa lapisan YSZ telah terdeposisi di atas permukaan substrat baik sebelum dipanaskan maupun setelah dipanaskan. Karakterisasi struktur kristal sampel menggunakan X-ray Diffraction (XRD) menunjukkan bahwa derajat kristalinitas lapisan tipis YSZ masih rendah baik dengan substrat dipanaskan maupun tanpa dipanaskan. Karakterisasi Raman Spectroscopy menunjukkan bahwa pada deposisi dengan temperatur ruang belum tampak dengan jelas ikatan dan fasa YSZ. Sedangkan pada sampel dengan substrat dipanaskan menghasilkan puncak pada 550 cm-1 yang menunjukkan bahwa lapisan cenderung amorf. Karakterisasi topografi permukaaan menggunakan AFM menunjukkan bahwa sampel yang dideposisi menggunakan teknik PLD menghasilkan surface roughness yang sangat halus dalam rentang nano-meter sehingga berpotensi digunakan sebagai aplikasi Thermal Barrier Coating (TBC) pada material temperatur tinggi.
Kata kunci : Lapisan tipis, Yttria-Stabilized Zirconia (YSZ), Pulsed Laser deposition (PLD), baja, nano-meter
Abstract
PRELIMINARY STUDY OF A YTTRIA-STABILIZED ZIRCONIA (YSZ) THIN FILM DEPOSITION ON A FERRITIC STEEL SUBSTRATE USING PLD - PULSED LASER DEPOSITION METHOD. A thin film of Ytrria-Stabilized Zirconia has been deposited on a ferritic stainless steel by Pulsed Laser Deposition (PLD) at laboratory facilities of Center For Science and Technology of Advanced Materials-BATAN. The thin film was deposited with the chamber pressure range of 200 mTorr to 225 mTorr, substrate temperature at room temperature, and 30x1000 shots of pulsed-laser with 10 Hz of frequency. Afterward, the sample was analyzed using Optical Microscope (OM), X-Ray Diffractometer (XRD), Raman Spectrometer and Atomic Force Microscope (AFM). As for comparison analysis, the sample was annealed at 800oC then characterized using the same methods. The result of analyses with visually and using OM then AFM showed that the thin film of YSZ was deposited on the surface of the substrate. The characterization of the crystal structure of the sample by using XRD showed that the crystallinity degree of thin film with the substrate both with and without annealing was still low. Raman spectroscopy characterization showed that the bond and phase of YSZ deposition with the substrate at room temperature were not clearly formed. Whereas the sample was annealed resulted peak at 550 cm-1, which is showed that the thin film was still amorphous. Surface topography characterization using AFM showed that the surface roughness of the sample deposited by PLD method was relatively smooth in the range of nano-meter.
Keywords: Thin film, Yttria-Stabilized Zirconia (YSZ), Pulsed Laser Deposition (PLD), steel, nano-me
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